Original ZYGO ZMI‑4004 6U VME64x heterodyne interferometer board, sub‑nanometer multi‑axis displacement measurement for lithography precision stage spare part.

Product Overview

ZMI‑4004 belongs to ZYGO ZMI metrology interface series, it is 4‑axis 6U VME64x bus measurement board for heterodyne laser interferometer system. It processes optical heterodyne signals from interferometer receivers, converts phase difference into high‑resolution linear and angular displacement position data. It supports patented cyclic‑error compensation, realizes sub‑nanometer measurement resolution and high‑speed motion tracking. Compatible with ZYGO 7702,7714,7724 series laser heads. Real‑time multi‑axis synchronous measurement output via VME parallel bus and HS‑Serial high‑speed serial interface. Widely used as maintenance spare part for semiconductor lithography equipment, precision inspection machine and ultra‑precision motion platform.

Key Features

• 4 independent measuring axes on single 6U VME64x slot for multi‑axis position feedback
• Sub‑nanometer position resolution up to 0.15 nm, maximum tracking velocity ±2.55 m/s
• Built‑in cyclic‑error reduction function to eliminate interferometer nonlinear measurement error
• Supports VME parallel bus and HS‑Serial high‑speed serial dual‑interface data output
• Front‑panel LED indicators for power, laser signal status and module fault diagnosis
• VME backplane power supply, reverse‑polarity protection circuit improves hardware reliability

• Standard 6U VME64x plug‑in structure, convenient integration and replacement inside VME chassis

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Technical Specifications

• Brand: ZYGO
• Model: ZMI‑4004
• Module Type: 4‑Axis Laser Interferometer Measurement Board
• Form Factor: 6U VME64x single‑slot
• Measurement Axes: 4 axes
• Position Resolution: 0.15 nm
• Max Tracking Velocity: ±2.55 m/s
• Compatible Laser Heads: ZYGO 7702,7714,7724
• Communication: VME parallel bus, HS‑Serial high‑speed serial
• Power Supply: VME backplane +5V,+12V,‑12VDC
• Operating Temp: ‑10℃ ~ +55℃
• Storage Temp: ‑40℃ ~ +85℃
• Humidity: 5‑95% non‑condensing

• Installation: Plug‑in inside VME64x chassis

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Compatibility

Matches ZYGO ZMI‑series interferometer optics and corresponding laser heads. Optical path inspection, parameter configuration download and multi‑axis displacement measurement function test required after replacement.