Product Overview

• Part No: 0190‑14502
• Brand: AMAT (Applied Materials)

• Category: V6U/DSP MEI Motion Controller VME Board0190‑14502 is a VME‑bus plug‑in motion control board built with MEI V6U/DSP architecture, widely deployed inside Applied Materials semiconductor processing tools. Equipped with dedicated digital signal processor, the board executes closed‑loop multi‑axis motion control for wafer transfer robots, precision positioning stages and material handling mechanisms. It processes position commands, encoder feedback signals, trajectory planning and servo loop calculation locally, reducing host CPU computing load. Standard VME64 bus interface enables high‑speed data interaction with system main controller. Designed for continuous 24‑7 operation in clean‑room fab environment, it serves as critical field‑replaceable spare for maintenance and upgrade of AMAT wafer fabrication equipment.

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Core Features

• DSP‑based multi‑axis closed‑loop motion control for precision servo axes
• Supports trajectory planning, position, velocity and acceleration profile calculation
• Direct processing of encoder position feedback signals
• VME64 compliant bus interface for high‑speed host communication
• On‑board hardware limit monitoring for motion safety interlock
• VME slot plug‑in design for quick replacement inside equipment chassis
• Industrial‑grade components adapted to clean‑room continuous operation

• Built‑in ESD and transient noise protection for signal circuits

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Technical Specifications

• Form Factor: VME single‑height plug‑in board
• Controller Chip: MEI V6U/DSP digital signal processor
• Bus Standard: VME64
• Operating Temperature: 0°C ~ +70°C
• Storage Temperature: -40°C ~ +85°C

• Power Supply: Powered via VME backplane

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Compatibility & Application

• Compatible with multiple AMAT semiconductor process platforms
• Mainly used for wafer transfer robot, substrate positioning stage motion control
• Applied in PVD, CVD and other wafer processing tools within semiconductor fabs