Measurement Range:500 SCCM

Accuracy:±1% of reading

Repeatability:±0.1% of full scale

Pressure Range:0 to 5 bar

Operating Temperature:-10°C to +50°C

Gas Compatibility:Nitrogen (N2)

Power Supply:12 VDC

Dimensions:150 mm x 100 mm x 80 mm

Weight:0.5 kg

    This mass flow controller is engineered with precision control mechanisms that ensure reliable operation in the most demanding semiconductor fabrication environments.

    Featuring advanced sensor technology, it offers unparalleled accuracy in flow rate measurement, critical for maintaining consistent process conditions.

    Compact yet robust design allows for easy integration into various equipment setups, minimizing downtime and enhancing operational efficiency.

    With its wide operating temperature range and efficient power consumption, this controller operates reliably across diverse environments, making it a versatile choice for both new installations and retrofit scenarios.

    Comprehensive compatibility with inert gases like nitrogen ensures compatibility with a wide array of semiconductor processes, maximizing process flexibility and reducing variability in output quality.