Brooks Automation 001-4130-03 wafer aligner controller module, used for precision wafer positioning and robotic transfer control in semiconductor cleanroom equipment, high stability and reliable performance.

Product Overview

Brooks Automation 001-4130-03 is a dedicated wafer aligner controller module for semiconductor manufacturing. It acts as the core control unit for Brooks wafer handler and pre-aligner systems, executing high-precision motion control to complete wafer positioning and angle correction before lithography, etching and deposition processes. It is a widely used spare part for legacy semiconductor fabrication equipment.

Key Features

• Sub-micron alignment precision, stable wafer positioning control
• Designed for cleanroom environment, meets semiconductor factory cleanliness requirements
• Seamless integration with Brooks wafer transfer and pre-aligner systems
• Built-in fault diagnosis function, convenient for equipment maintenance

• Compact PCB control structure, easy replacement and installation

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Technical Specifications

• Part No: 001-4130-03
• Brand: Brooks Automation
• Type: Wafer Aligner Controller Module
• Application: Wafer handler / Pre-aligner system
• Working Environment: Semiconductor cleanroom

• Origin: USA

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Application

Semiconductor wafer fabrication, lithography, etching, thin film deposition, wafer handling and pre-alignment process.