Material:Stainless Steel

Vacuum Range:1x10^-7 Torr

Maximum Flow Rate:100 L/min

Pressure Rating:500 Torr

Temperature Range:-50°C to +150°C

Power Consumption:25W

Connection Type:ISO Flange

Size:127mm x 93mm

Weight:0.5kg

    Engineered for optimal performance in demanding vacuum conditions, the MKS Instruments 93-6127 796-801289-001VLV.2 High Vacuum Right Angle Stage Module is a critical component for advanced semiconductor processing and research applications.

    Featuring a robust stainless steel construction, this module ensures durability and resistance to corrosion, ensuring longevity in harsh environments.

    With its right-angle design, it optimizes space utilization and simplifies integration into complex setups, enhancing efficiency in cleanroom environments.

    The module’s absence of a housing allows for unobstructed access and easy maintenance, crucial for maintaining operational uptime in high-reliability applications.

    Offering an impressive positioning accuracy of ±0.01mm, it delivers unparalleled precision necessary for achieving the highest quality standards in semiconductor manufacturing and research.

    Adaptable to a wide range of operating temperatures (-40°C to +120°C), this module can withstand extreme conditions, making it suitable for various industrial and laboratory settings.